Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

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Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication. Ths handbook will be useful to researchers and engineers who are not yet specilists in the field and will serve as a reference book for experts. The material is presented in such a manner as to allow the book to be utilised as a comprehensive reference book.Volume 2 of the Handbook focuses on the process technology and the numerous device applications using Micromachining and microfabrication.


Title:Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication
Author: P. Rai-Choudhury
Publisher:IET - 1997-01-01
ISBN-13:

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